Processes of plasma etching in microelectronics and nanotechnology. Tutorial / Protsessy plazmennogo travleniya v mikro- i nanotekhnologiyakh. Uchebnoe posobie
EAN/UPC/ISBN Code
9785996300327
Brand
Лаборатория знаний
Producer
Бином. Лаборатория знаний
Weight
324 gr
Pages
288
Year of production
2018
Binding
60x90/16