Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)
Price 150.00 - 258.86 USD
EAN/UPC/ISBN Code
9780815512806, 9780815512806
Brand
William Andrew Inc
Author
Kiyotaka Wasa
Pages
316
Year of production
2010
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.